NADAtech SMIF wafer sorters for 150mm and 200mm provide industry standard SMIF ports for Sub Class 1 environment particle performance. All models include industry standard robotic components for longest term reliability and support-ability, NADAtech’s RBuilder recipe development tool, and SUREscan thrubeam carrier scanning for perfect wafer mapping.

• 2 to 4 station configurations available
• 325wph OCR / 800wph transfer
• Industry standard OEM robotics
• Automation capable with SECSII / GEM / HSMS
• Vacuum backside or edge handling
• IOSS OCR
• UPS power backup + vacuum reservoir
• Speak with a rep about available Sorter+ Options