N Series
50mm to 200mm OC Wafer Sorters

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The N Series OC Sorters (also known as Open Cassette or Open Carrier Sorters) are perfect for 50mm through 200mm wafer sizes when you need a small footprint and fast speeds. All models include industry standard robotic components for longest term reliability and support-ability, NADAtech’s RBuilder recipe development tool, and SUREscan thrubeam carrier scanning for perfect wafer mapping. Each system is tailored to your specific needs by adding preferred Sorter+ options.
- 2-6 station for better queuing and larger splits
- 325wph OCR / 800wph transfer
- Dual paddle buffering for same carrier sorting
- Concurrent wafer size options available
- Vacuum backside, passive or active edge handling
- IOSS OCR
- All Sorter+ Options can be added on this tool
- Smallest 4 station single level footprint available in industry, with smaller 2 station footprint available for tight fab spacing
