tSeries 300mm Sorters

200mm bridge and 300mm wafer sorters

NADAtech t2A
NADAtech t4A tSeries 300mm Sorters
  • FOUP/FOSB wafer sorters for 300mm or 150mm/200mm/300mm bridge applications
  • All systems use best available industry standard robots / ports / aligner and OCR or highest system reliability
  • 2 to 6 station with inline and back to back configurations available
  • fully integrated or port specific 150mm/200mm/300mm bridge configurations available
  • SECSII/GEM/HSMS/GEM300·with GUI based highly flexible recipe tools
  • available with ALL Sorter+ options