nSeries OC Sorters
50mm to 200mm open carrier wafer sorters
- Open cassette wafer sorters for wafer sizes 50mm through 200mm.
- Uses industry standard robotic components for longest term reliability and support-ability.
- 1 to 5 stations with multiple concurrent carrier sizes are available.
- Top features include NADAtech's RBuilder recipe development tool.
- Perfect wafer mapping using SUREscan thrubeam carrier scanning.