150mm / 200mm thin wafer
for unique needs of small diameter highly thinned wafers, NADAtech has a line of robot end-effectors and wafer alignment technologies to accommodate handling thin and delicate wafers.
- specialized thinned wafer paddles for 150mm / 200mm including bernoulli
- unique aligner technologies to overcome thin wafer alignment problems
- automated 13 / 25 slot open carrier detection