Flexible wafer sorters with integrated defect inspection and metrology—NADAtech semiconductor automation systems

Advanced Wafer Sorter Solutions

Engineered Automation that Adapts to Your Process Requirements

NADAtech delivers wafer automation systems for all major semiconductor related industries. We use only the highest reliability industry standard robotics and OEM parts. Each system is highly configurable from the number of ports to application specific options, including high speed sorting, thin wafer, and a number of precision inspection and metrology capabilities.

300mm Wafer Sorters

150mm - 200mm SMIF Wafer Sorters

50mm - 200mm OC Wafer Sorter

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300mm Wafer Sorters

NADAtech T Series 300mm wafer sorters are FOUP/FOSB carrier compatible for fully integrated or port specific 150mm/200mm/300mm bridge configurations. All systems use the best available industry standard robots, loadports, aligners and OCR for highest system reliability. Available options include BOLTS compliant open cassette adapters to allow 150mm and 200mm open cassette carriers, and auto detect adapters for seamless 200mm OC to 300mm FOUP detection. Our T Series product line offers the smallest 300mm two port footprint available in the industry with Sub Class 1 environment particle performance.

4 port 300mm wafer sorter-inset
  • 2 to 8 station with inline and back to back configurations available
  • NADAtech's GEM 300 sorting package for fully automated 300mm fabs
  • Industry standard dual yaw trackless robotics
  • Industry standard 300mm loadports
  • Integrated RFID and E84 OHT delivery options
  • 150mm / 200mm / 300mm vacuum backside or edge aligners
  • IOSS OCR
  • UPS power backup +vacuum reservoir
  • All Sorter+ Options are available on this system

150mm - 200mm SMIF Wafer Sorters

NADAtech S Series SMIF wafer sorters for 150mm and 200mm provide industry standard SMIF ports for Sub Class 1 environment particle performance. All models include industry standard OEM robotic components for longest term reliability and support-ability, NADAtech’s RBuilder recipe development tool, and SUREscan thrubeam carrier scanning for perfect wafer mapping. 2 to 4 station configurations are available with vacuum backside or edge handling options.

S25 SMIF Wafer Sorter
  • 2 to 4 station configurations available
  • Industry standard OEM robotics
  • Automation capable with SECSII / GEM / HSMS
  • Vacuum backside or edge handling
  • IOSS OCR
  • UPS power backup + vacuum reservoir

50mm - 200mm OC Wafer Sorters

The N Series OC Sorters (also known as Open Cassette or Open Carrier Sorters) are perfect for 50mm through 200mm wafer sizes when you need a small footprint and fast speeds. Concurrent wafer size options are available with 2 to 6 stations for better queuing and larger splits. All models include industry standard robotic components for longest term reliability and support-ability, NADAtech’s RBuilder recipe development tool, and SUREscan thrubeam carrier scanning for perfect wafer mapping. Each system is tailored to your specific needs by adding preferred Sorter+ options.

N Series Wafer Sorter with Automated Optical Inspection
  • 2-6 station for better queuing and larger splits
  • Dual paddle buffering for same carrier sorting
  • Concurrent wafer size options available
  • Vacuum backside, passive or active edge handling
  • IOSS OCR
  • All Sorter+ Options can be added on this tool
  • Smallest 4 station single level footpraint available in industry, with smaller 2 station footprint available for tight fab spacing