Modular Wafer Handling for OEM Integration
Integrated EFEM and Metrology Tools for OEM Semiconductor Systems
NADAtech is a trusted supplier of Equipment Front End Modules (EFEMs) to OEMs developing semiconductor manufacturing equipment for Front-End-of-Line (FEOL) and Advanced Packaging processes. EFEMs are essential for automating wafer loading into process tools—and NADAtech delivers solutions engineered for performance, precision, and flexibility.
Our portfolio includes 2, 3, and 4 loadport EFEMs, compatible with a wide range of wafer carriers including open cassettes, SMIF pods, and FOUPs/FOSBs. Loadports can be configured for manual carrier loading or fully automated OHT (Overhead Transport) systems, based on tool architecture and fab integration requirements.
Each EFEM leverages our proven SUREscan wafer mapping interface—technology trusted to move hundreds of millions of wafers through our sorters and stockers. Combined with best-in-class robotics and precision aligners, NADAtech EFEMs deliver exceptional reliability and throughput.
Available in a broad range of configurations, our EFEMs can be tailored to your toolset with custom hardware and software options that align with your OEM production strategy.
