NADAtech sSeries s25

s25

  • 200mm 2 port SMIF carrier compatible·
  • Industry standard MOOG OEM robotics
  • Industry standard SMIF 200mm ports
  • Sub class 1 particle performance
  • Automation capable with SECSII/GEM/HSMS
  • GUI based RBuilder for easy recipe development
  • UPS power backup + vacuum reservoir
  • available with select Sorter+ options