Wafer Edge Inspection

Wafer Edge Inspection

  • Top and Bottom Bevel Inspection Option
  • bolt on application for NADA or PST sorters
  • inspection option which scans the wafer bevel for cracks and chips
  • standard ascii and SECS/GEM reporting with defect size and location
  • optional image capture and industry standard XY Report Formating
  • captures defects down to 0.5mm
  • function can be added to any typical sort recipe
  • lastest generation seeing defects down to 60um
NADAtech Chipchecker