nSeries OC Sorters

50mm to 200mm open carrier wafer sorters

  • Open cassette wafer sorters for wafer sizes 50mm through 200mm.
  • Uses industry standard robotic components for longest term reliability and support-ability.
  • 1 to 5 stations with multiple concurrent carrier sizes are available.
  • Top features include NADAtech's RBuilder recipe development tool.
  • Perfect wafer mapping using SUREscan thrubeam carrier scanning.