150mm/200mm Thin Wafer

150mm / 200mm thin wafer

for unique needs of small diameter highly thinned wafers, NADAtech has a line of robot end-effectors and wafer alignment technologies to accommodate handling thin and delicate wafers.

  • specialized thinned wafer paddles for 150mm / 200mm including bernoulli
  • unique aligner technologies to overcome thin wafer alignment problems
  • automated 13 / 25 slot open carrier detection